Molflow for sputtering simulations

07.10.2020 - CERN

Using Molflow to test various cathode configuration to measure/optimize deposited film thickness.

First part: using Molflow's built-in tools to test cathode configurations in an elliptic chamber

Second part: importing a real RF cavity model and extracting/post-processing resulting profile

Printout:
molflow_for_sputtering.pdf

Introduction (presentation):
molflow_intro.pptx

Files you need for RF cavity part:
20201007_seminar_input.zip

Solved ellipse cavity:
3_ellipse_solved.zip
ellipse_thickness.xlsx

Solved RF cavity:
rfcavity_equalized.zip
impingement_results.xlsx